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2,4,6,8-tetramethylcyclotetrasiloxane
Catalog Number
2370-88-9
CAS
2370-88-9
Synonyms
1,3,5,7-TETRAMETHYLCYCLOTETRASILOXANE; 2,4,6,8-TETRAMETHYLCYCLOTETRASILOXANE; TMCTS; 1,2,5,7-Tetramethylcyclotetrasiloxane; 2,4,6,8-Tetramethyl-1,3,5,7,2,4,6,8-tetraoxatetrasilocane; 2,4,6,8-tetramethyl-cyclotetrasiloxan; 2,4,6,8-tetramethylcyclotetrasiloxane,
Application
2, 4, 6, 8-Tetramethylcyclotetrasiloxane (TMCTS) is an important precursor for the deposition of polysiloxane, cyclic siloxane, silicon dioxide, oxycarbide thin films with low dielectric constant for microelectronics, semiconductors and other applications.
Molecular Weight
240.51
Molecular Formula
C4H16O4Si4
Product Information
Purity
≥99.99%
MDL
MFCD00039567
Physical State
Liquid
Appearance
Colorless or yellowish transparent liquid
Storage
Keep cold.
Boiling Point
134 °C / 760 mmHg
Melting Point
-69 °C
Flash Point
24 °C(75.2 °F)
Density
0.986
Refractive Index
1.387 (lit.)
Level
deposition grade
Safety Information
Signal Word
Warning
Precautionary Statement
P305+P351+P338
Hazard Statements
H226-H319
Hazard Class
3
TSCA
Yes
WGK Germany
3
Packing Groups
III
Canonical SMILES
C[SiH]1O[SiH](C)O[SiH](C)O[SiH](C)O1
InChI
InChI=1S/C4H12O4Si4/c1-9-5-10(2)7-12(4)8-11(3)6-9/h1-4H3
InChI Key
WZJUBBHODHNQPW-UHFFFAOYSA-N
