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disilane
Catalog Number
1590-87-0
CAS
1590-87-0
Synonyms
DISILANE; Si2H6; Silicoethane; DISILANE, 99.998%, ELECTRONIC GRADE; disilicoethane
Application
Precursor for the rapid, low temperature deposition of epitaxial silicon and silicon-based dielectrics.
Molecular Weight
62.2186
Molecular Formula
H6Si2
Product Information
MDL
MFCD00054678
Appearance
Gas
Flash Point
< 10 °C(50.0 °F)
Density
0,686 g/cm3
Level
electronic grade
Safety Information
Signal Word
Danger
Precautionary Statement
P210-P261-P280-P305+P351+P338-P342+P311-P410+P403
Hazard Statements
H220-H280-H312-H315-H319-H332-H334-H335
Hazard Class
2.1
WGK Germany
3
Canonical SMILES
[SiH3][SiH3]
