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Vapor Deposition Precursors
CVD and ALD Precursors
Tantalum(V) ethoxide
Tantalum(V) ethoxide
Product Information
Catalog Number
6074-84-6
CAS
6074-84-6
IUPAC Name
ethanolate;tantalum(5+)
Synonyms
ethanol,tantalum(5+)salt; TANTAL(V)-ETHOXID; TANTALUM PENTAETHOXIDE; TANTALUM(V) ETHOXIDE; TANTALUM ETHOXIDE; TANTALUM ETHYLATE; tantalum(5+) ethanolate; Tantalum(V) ethoxide, 99.98% metals basis
Molecular Weight
406.25
Molecular Formula
C10H25O5Ta
Product Information
Purity
99.9%
MDL
MFCD00049785
Physical State
Liquid
Flash Point
29 °C(84.2 °F)
Density
1.566
Refractive Index
1.487 (lit.)
Safety Information
Signal Word
Danger
Precautionary Statement
P210-P233-P303+P361+P353-P370+P378-P403+P235-P501
Hazard Statements
H226-H314
Hazard Class
3(8)
Packing Groups
II
SMILES
CCO[Ta](OCC)(OCC)(OCC)OCC
InChI
InChI=1S/5C2H5O.Ta/c5*1-2-3;/h5*2H2,1H3;/q5*-1;+5
InChI Key
HSXKFDGTKKAEHL-UHFFFAOYSA-N
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