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[CVD and ALD Precursors] Tetrakis(dimethylamido)hafnium(IV) (19782-68-4)
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CVD and ALD Precursors
Tetrakis(dimethylamido)hafnium(IV)
Tetrakis(dimethylamido)hafnium(IV)
Catalog Number
19782-68-4
CAS
19782-68-4
Synonyms
TDMAH,Tetrakis(dimethylamino)hafnium(IV)
Molecular Weight
354.79
Molecular Formula
[(CH3)2N]4Hf
Product Information
Purity
≥99.99%
MDL
MFCD01862473
Physical State
Solid
Flash Point
43 °C(109.4 °F)
Density
1.098 g/mL at 25 °C
Safety Information
Signal Word
Danger
Precautionary Statement
P210-P231+P232-P280-P305+P351+P338-P370+P378-P402+P404
Hazard Statements
H228-H261-H314
Hazard Class
4.1(4.3)
WGK Germany
3
Packing Groups
II
Canonical SMILES
CN(C)[Hf](N(C)C)(N(C)C)N(C)C
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