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Tetrakis(ethylmethylamido)zirconium(IV)
Catalog Number
175923-04-3
CAS
175923-04-3
Synonyms
TEMAZ,Tetrakis(ethylmethylamino)zirconium(IV)
Application
Precursors Packaged for Depositions Systems.
Molecular Weight
323.63
Molecular Formula
Zr(NCH3C2H5)4
Product Information
Purity
≥99.99%
MDL
MFCD03427131
Physical State
Liquid
Flash Point
10 °C(50.0 °F)
Density
1.049 g/mL at 25 °C (lit.)
Safety Information
Signal Word
Danger
Precautionary Statement
P210-P231+P232-P302+P352-P305+P351+P338
Hazard Statements
H225-H261-H315-H319-H335
Hazard Class
4.3
WGK Germany
3
Packing Groups
II
Canonical SMILES
CCN(C)[Zr](N(C)CC)(N(C)CC)N(C)CC
