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TRIS(DIMETHYLAMINO)SILANE
Catalog Number
15112-89-7
CAS
15112-89-7
Synonyms
TRIS(DIMETHYLAMINO)SILANE; n,n,n',n',n'',n''-hexamethyl-silanetriamin; n,n,n',n',n'',n''-hexamethylsilanetriamine; N,N,N',N',N'',N''-hexamethyl-Silanetriamine; TRIS(DIMETHYLAMINO)SILANE 99+%; Tris(dimethyamino)silane
Application
Tris(dimethylamino)silane (TDMAS) is used as an organosilicon source for the deposition of Si oxynitride; carbonitride; nitride and oxide thin films.
Molecular Weight
161.32
Molecular Formula
C6H19N3Si
Product Information
Purity
95%
MDL
MFCD00048006
Physical State
Liquid
Appearance
colorless liq.
Boiling Point
139.8ºC at 760 mmHg
Flash Point
-8.89 - 0,00 °C(16.0 - 32.0 °F)
Density
0,838 g/cm3
Safety Information
Signal Word
Danger
Precautionary Statement
P210-P231+P232-P280-P303+P361+P353-P304+P340+P310-P305+P351+P338
Hazard Statements
H225-H261-H302-H311-H314-H330
Hazard Class
4.3
WGK Germany
3
Packing Groups
II
Canonical SMILES
CN(C)[Si](N(C)C)N(C)C
InChI
InChI=1S/C6H18N3Si/c1-7(2)10(8(3)4)9(5)6/h1-6H3
InChI Key
GIRKRMUMWJFNRI-UHFFFAOYSA-N
